MSS16-G Series filter cartridges are especially designed for process gas filtration like inert gas, special gas and compressed air in semiconductor manufacturing process. Lts compact design is very suitable for the narrow machine space.
Features - PTFE membrane provides high efficiency and excellent chemical compatibility
- Removal rating up to>3nm achieving precision filtration
- Compact structure for easy installation
- High cleanliness
- 100% integrity test
Application - Compressed air
- Nitrogen
- Process gases
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